Structure, Mechanical and Tribological Properties of Ti-Doped and Cr-Doped a-C:H:SiOx Coatings | Sciact - CRIS-system of Boreskov Institute of Catalysis

Structure, Mechanical and Tribological Properties of Ti-Doped and Cr-Doped a-C:H:SiOx Coatings Full article

Journal

Vacuum
ISSN: 0042-207X

Output data

Year: 2024, Volume: 219, Article number : 112706, Pages count : 13 DOI: 10.1016/j.vacuum.2023.112706

Tags

a-C:H:SiOx coatings; Me-doped DLC; PACVD; Magnetron sputtering; Hardness; Wear resistance; Adhesive strength

Authors

Grenadyorov A.S. ¹ , Solovyev А.А. ¹ , Oskirko V.O. ¹ , Oskomov K.V. ¹ , Semenov V.A. ¹ , Sypchenko V.S. ² , Saraev A.A. ³

Affiliations

1	The Institute of High Current Electronics SB RAS, 2/3, Akademichesky Ave., 634055, Tomsk, Russia
2	National Research Tomsk Polytechnic University, 30, Lenin Ave., 634050, Tomsk, Russia
3	Federal Research Center Boreskov Institute of Catalysis, 5, Lavrentiev Ave, 630090, Novosibirsk, Russia

Funding (2)

1	Ministry of Science and Higher Education of the Russian Federation	0239-2021-0003
2	Ministry of Science and Higher Education of the Russian Federation	FWRM-2021-0006

The work is devoted to the deposition of Ti- and Cr-doped a-C:H:SiOx coatings on WC-8Co substrates using plasma-assisted chemical vapor deposition and magnetron sputtering methods. The structure, surface morphology, mechanical and tribological properties of coatings are investigated depending on the Ti or Cr content. It is shown that only a small concentration of Ti or Cr in coatings improves their mechanical and tribological properties compared to undoped coatings. The addition of 0.8 at.% Ti to the a-C:H:SiOx coating reduces its wear rate by 3 times, and the addition of 3 at.% Cr to the a-C:H:SiOx coating reduces its friction coefficient by 30% and the wear rate by 10 times. According to VDI 3198 standard, the Ti- and Cr-doped a-C:H: SiOx coatings with a low concentration of metals have the adhesive strength quality HF1. At higher metal concentrations, the properties of the coatings deteriorate due to graphitization of the carbon structure.

Grenadyorov A.S. , Solovyev А.А. , Oskirko V.O. , Oskomov K.V. , Semenov V.A. , Sypchenko V.S. , Saraev A.A.
Structure, Mechanical and Tribological Properties of Ti-Doped and Cr-Doped a-C:H:SiOx Coatings
Vacuum. 2024. V.219. 112706 :1-13. DOI: 10.1016/j.vacuum.2023.112706 WOS Scopus РИНЦ AN OpenAlex

Submitted:	Jun 20, 2023
Accepted:	Oct 15, 2023
Published online:	Oct 20, 2023
Published print:	Jan 1, 2024

Web of science:	WOS:001102028500001
Scopus:	2-s2.0-85174443693
Elibrary:	65725155
Chemical Abstracts:	2023:2189808
OpenAlex:	W4387817497

DB	Citing
OpenAlex	2
Scopus	2
Web of science	1