Abstract: This paper proposes to use a methodology for measuring deformations of solids that has important advantage over similar methods of this class, such as Phase measuring deflectometry and digital image correlation (DIC) based deflectometry which are known to require complex and labor-intensive calibration schemes, sometimes involving additional reference surfaces. We propose to use the reflective (moon-glade) background oriented schlieren (BOS) technique for measuring relative deformations of mirror surfaces. This method employs cross-correlation analysis of two reflected images of the background dot pattern from the mirror surface, similar to DIC-based deflectometry. The difference lies in the procedure of deformation field recovery, which is performed by solving the Poisson equation with the corresponding boundary conditions. A key advantage of the approach is the trivial callibration, requiring resolution in the background dot pattern plane and the mirror surface plane. Relative deformations of a steel specular substrate, induced by heating with a copper rod at its center, were measured. The results indicate that the resolution of this approach is approximately 50 nm. Measurement reliability was further validated by comparing the data with a commercial confocal optical sensor of the Micro-Epsilon, showing good agreement.

Cite: Mungalov A.S. , Kochkin D.Y. , Pukhovoy M.V. , Zolotarev K.V. , Kabov O.A.
Measurement of Submicro-Deformation of Optical Elements Using Reflective Background Oriented Schlieren Technique
Eurasian Journal of Mathematical and Computer Applications. 2025. V.13. N1. P.79– 88. DOI: 10.32523/2306-6172-2025-13-1-79-88 WOS OpenAlex publication_identifier_short.sciact_skif_identifier_type

Dates:

Submitted:	Nov 19, 2024
Accepted:	Jan 25, 2025
Published online:	Mar 31, 2025

Identifiers:

Web of science:	WOS:001459853500007
OpenAlex:	W4409196065
publication_identifier.sciact_skif_identifier_type:	3826

Citing: Пока нет цитирований

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