Direct Writing on PbWO4 Monocrystalline Using X-rays Conference attendances
Language | Английский | ||||
---|---|---|---|---|---|
Participant type | Стендовый | ||||
URL | https://indico.inp.nsk.su/event/24/contributions/1044/ | ||||
Conference |
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 13-17 Jul 2020 , Novosibirsk |
||||
Authors |
|
||||
Affiliations |
|
Abstract:
The lithographic profile on the material surface is usually based on making structural changes in the intermediate - technological layer using radiation, and the subsequent transfer of the resulting topology to the underlying layer of the functional material. However, not all materials enable the removal process that meets the sufficient selectivity value. This report presents the results of direct writing a relief on an inorganic PbWO4 crystal using synchrotron radiation in the X-ray range. This work is partially supported by RFBR grant № 19-42-540014.
Cite:
Nazmov V.P.
, Goldenberg B.G.
, Mikhailenko M.A.
Direct Writing on PbWO4 Monocrystalline Using X-rays
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 13-17 Jul 2020
Direct Writing on PbWO4 Monocrystalline Using X-rays
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 13-17 Jul 2020