Manufacturing of High Resolution X-ray Masks for LIGA Technology in SSTRC - Conference attendances | Sciact - CRIS-system of Boreskov Institute of Catalysis

Manufacturing of High Resolution X-ray Masks for LIGA Technology in SSTRC Conference attendances

Language

Английский

Participant type

Устный

URL

https://indico.inp.nsk.su/event/3/contributions/1218/

Conference

The International Conference "Synchrotron and Free electron laser Radiation: generation and application"
04-07 Jul 2016 , Novosibirsk

Authors

Lemzyakov A. A. ¹ , Gentselev Aleksandr Nikolaevich ¹ , Goldenberg Boris Grigoryevich ¹ , Nazmov Vladimir P. ¹

Affiliations

1	Budker Institute of Nuclear Physics SB RAS

One of main problems in deep X-ray lithography (DXRL) is X-ray masks fabrication. The primary way to get high-resolution X-ray masks is to use soft X-ray lithography with intermediate X-ray mask. The soft X-ray lithography is performed at “LIGA” station of VEPP-3 synchrotron radiation (SR) source in Siberian Synchrotron and Terahertz Radiation Centre (SSTRC). In addition, the technique of fabrication of intermediate X-ray mask based on titanium membrane is developed.

Lemzyakov A.A. , Gentselev A.N. , Goldenberg B.G. , Nazmov V.P.
Manufacturing of High Resolution X-ray Masks for LIGA Technology in SSTRC
The International Conference "Synchrotron and Free electron laser Radiation: generation and application" 04-07 Jul 2016