PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography - Conference attendances | Sciact - CRIS-system of Boreskov Institute of Catalysis

PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography Conference attendances

Language

Английский

Participant type

Стендовый

Conference

International Conference "Synchrotron and Free electron laser Radiation: generation and application"
27-30 Jun 2022 , Novosibirsk

Authors

Nazmov Vladimir P. ^1,2 , Varand Alexander ¹ , Mikhailenko Mikhail A. ² , Goldenberg Boris Grigoryevich ^1,3 , Prosanov Igorʹ Yurʹevich ² , Gerasimov Konstantin Borisovich ² , Lubas Gleb ²

Affiliations

1	Budker Institute of Nuclear Physics SB RAS
2	Institute of Solid State Chemistry and Mechanochemistry SB RAS
3	Siberian Circular Photon Source

In the present work, we studied polymethyl methacrylate, with a molecular weight of ten million grams per mole achieved by ionic polymerization, which differs from its widely used analogue by an approximately tenfold increase in the length of the polymer chain. Based on the obtained absorption spectra in the IR range, data from differential thermal analysis and gel permeation chromatography, the changes caused by the ionizing radiation are studied. During thermal decomposition of the initial polymer, the mass loss dependence can be divided into different sections: low-temperature with a maximum decomposition rate at 260.5-261 °C and a process start point at 207-209 °C and a high-temperature one with a maximum decomposition rate at 379-379 °C with a process start point at 346-348 °C and the end of the process at 398-400 °C.

Nazmov V.P. , Varand A. , Mikhailenko M.A. , Goldenberg B.G. , Prosanov I.Y. , Gerasimov K.B. , Lubas G.
PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography
International Conference "Synchrotron and Free electron laser Radiation: generation and application" 27-30 Jun 2022