Deposition of Ni Thin Films from Ni(II) β-Diketonates Derivatives with 1,3-Diaminopropane
Научная публикация
| Общее |
Язык:
Английский,
Жанр:
Статья (Full article),
Статус опубликования:
Опубликована,
Оригинальность:
Оригинальная
|
| Журнал |
Journal of Physics and Chemistry of Solids
ISSN: 0022-3697
|
| Вых. Данные |
Год: 2013,
Том: 74,
Номер: 9,
Страницы: 1204-1211
Страниц
: 8
DOI:
10.1016/j.jpcs.2013.03.018
|
| Ключевые слова |
Organometallic compounds, Thin films, Vapour deposition, Ab initio calculations, EXAFS |
| Авторы |
Dorovskikh S.I.
1
,
Trubin S.V.
1
,
Filatov E.S.
1
,
Kriventsov V.V.
2
,
Kozlova S.G.
1
,
Shubin Yu.V.
1
,
Morozova N.B.
1
,
Igumenov I.K.
1
|
| Организации |
| 1 |
Институт неорганической химии им. А.В. Николаева СО РАН
|
| 2 |
Институт катализа им. Г.К. Борескова СО РАН
|
|
Информация о финансировании (4)
|
1
|
Министерство образования и науки Российской Федерации
|
14.518.11.7022
|
|
2
|
Президиум СО РАН
|
64
|
|
3
|
Российский фонд фундаментальных исследований
|
12-03-01039 (01201258422)
|
|
4
|
Российский фонд фундаментальных исследований
|
12-03-01154
|
Two octahedral nickel complexes namely Ni(pda)(hfac)2 and Ni(pda)(thd)2 (pda—1,3-diaminopropane, hfac—1,1,1,5,5,5-hexafluoro-2,4-pentanedionato (−), thd—2,2,6,6-tetramethyl-3,5-heptanedionato (−)) were tested in a Metal-Organic Chemical Vapor Deposition (MOCVD) process. Based on density functional theory (DFT) calculations, the thermodynamic stability of molecules in the gas phase was estimated. The intramolecular bond was found in case of complex Ni(pda)(hfac)2. The different fragmentation mechanisms of complexes in the gas phase were examined by double focusing sector (DFS) mass spectrometry. According to TG/DTA analyses and P/T measurements compounds have good volatility. Deposition conditions resulting in one phase Ni films were established. Films compositions and structures were confirmed by XRD, EXAFS, XPS, and SEM. According to XRD and SEM, the average crystallite sizes and thicknesses of films deposited from Ni(pda)(hfac)2 were 12–34 nm and 135–320 nm, whereas from Ni(pda)(thd)2 they were 10–24 nm and 100–380 nm, respectively. The dependences of films thicknesses as a function of substrate temperatures have shown that complex Ni(pda)(hfac)2 is more stable in the gas phase than Ni(pda)(thd)2.