Study of AlN Coatings for Microstrip Gas Chambers Full article
| Conference |
7th Pisa Meeting on Advanced Detectors 25-31 May 1997 , La Biodola, Isola d’Elba |
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| Journal |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002 |
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| Output data | Year: 1998, Volume: 409, Number: 1-3, Pages: 33-36 Pages count : 4 DOI: 10.1016/S0168-9002(97)01229-1 | ||||||
| Tags | Activation energy; Electric conductivity of solids; Electron emission; Film preparation; Microstrip devices; Semiconducting aluminum compounds; Semiconducting films; Substrates; Thermal effects; X ray photoelectron spectroscopy | ||||||
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Abstract:
A new semiconducting coating material for microstrip gas chambers (MSGCs) has been studied: AlN. The conductivity of AlN films at room temperature varies from 10(-10) to 10(-12) Ohm(-1) cm(-1) depending on the preparation conditions; it increases with temperature with an activation energy of 0.8-0.9 eV. The electron-induced secondary electron emission yield from AlN has been measured: it is about 5 at the maximum. The influence of the substrate nature and that of the film's preparation conditions on the composition of AlN films are investigated using X-ray photoelectron spectroscopy.
Cite:
Buzulutskov A.
, Bondar A.
, Mironenko L.
, Nagaslaev V.
, Shekhtman L.
, Tatarinov A.
, Kascheev S.
, Belyanin A.
, Blaut-Blachev A.
, Bouilov L.
, Spitsyn B.
Study of AlN Coatings for Microstrip Gas Chambers
Nuclear Instruments and Methods in Physics Research Section A. 1998. V.409. N1-3. P.33-36. DOI: 10.1016/S0168-9002(97)01229-1 WOS Scopus РИНЦ ANCAN OpenAlex
Study of AlN Coatings for Microstrip Gas Chambers
Nuclear Instruments and Methods in Physics Research Section A. 1998. V.409. N1-3. P.33-36. DOI: 10.1016/S0168-9002(97)01229-1 WOS Scopus РИНЦ ANCAN OpenAlex
Dates:
| Published print: | May 21, 1998 |
| Published online: | Feb 4, 1999 |
Identifiers:
| Web of science: | WOS:000074975100010 |
| Scopus: | 2-s2.0-0032066398 |
| Elibrary: | 13299962 |
| Chemical Abstracts: | 1998:494586 |
| Chemical Abstracts (print): | 129:208341 |
| OpenAlex: | W2022787030 |