Effect of Annealing Temperature on the Morphology, Structure, and Optical Properties of Nanostructured SnO(x) Films Научная публикация
Журнал |
Materials Research Express
, E-ISSN: 2053-1591 |
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Вых. Данные | Год: 2020, Том: 7, Номер: 1, Номер статьи : 015027, Страниц : 9 DOI: 10.1088/2053-1591/ab6122 | ||||||||||
Ключевые слова | absorption coefficient; epitaxy; nanostructured film; tin oxide; x-ray diffraction | ||||||||||
Авторы |
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Организации |
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Информация о финансировании (3)
1 | Российский фонд фундаментальных исследований | 18-32-20064 (АААА-А19-119090490028-1) |
2 | Российский фонд фундаментальных исследований | 18-42-540018 |
3 | Российский фонд фундаментальных исследований | 18-52-41006 (АААА-А18-118060490033-9) |
Реферат:
Nanostructured SnO(x) films were obtained by molecular beam epitaxy (MBE). The morphology, structure, and optical properties of obtained films annealed in the temperature range of 200 °C-1000 °C were studied. The reflection high-energy electron diffraction during the film deposition by the MBE method and the x-ray phase analysis showed that the initial films are in the polycrystalline phase. A single orthorhombic SnO2 phase was obtained for the first time after annealing the SnO(x) film in the air at a temperature of about 500 °C. The sharp change in the optical constants near the temperature of 500 °C was established using ellipsometry. The pronounced absorption edge appears in the short-wave region at temperatures above 500 °C and it disappears at lower temperatures. The film thickness changed non-monotonically during the annealing in the air. At first, it grows from 45 nm to 65 nm (active oxidation to 500 °C), and then (above 600 °C) it begins to decrease. The annealing at temperatures of 500 °C-1000 °C leads to the film compaction, since the film thickness decreases to 50 nm, but the refractive index increases by 10%-15%. Optical constants track the progress of film phase and morphological changes. © 2020 The Author(s). Published by IOP Publishing Ltd.
Библиографическая ссылка:
Timofeev V.A.
, Mashanov V.I.
, Nikiforov A.I.
, Azarov I.A.
, Loshkarev I.D.
, Korolkov I.V.
, Gavrilova T.A.
, Yesin M.Y.
, Chetyrin I.A.
Effect of Annealing Temperature on the Morphology, Structure, and Optical Properties of Nanostructured SnO(x) Films
Materials Research Express. 2020. V.7. N1. 015027 :1-9. DOI: 10.1088/2053-1591/ab6122 WOS Scopus РИНЦ CAPlus OpenAlex
Effect of Annealing Temperature on the Morphology, Structure, and Optical Properties of Nanostructured SnO(x) Films
Materials Research Express. 2020. V.7. N1. 015027 :1-9. DOI: 10.1088/2053-1591/ab6122 WOS Scopus РИНЦ CAPlus OpenAlex
Файлы:
Полный текст от издателя
Даты:
Поступила в редакцию: | 11 окт. 2019 г. |
Принята к публикации: | 10 дек. 2019 г. |
Опубликована online: | 12 дек. 2019 г. |
Опубликована в печати: | 6 янв. 2020 г. |
Идентификаторы БД:
Web of science: | WOS:000508226200001 |
Scopus: | 2-s2.0-85077949816 |
РИНЦ: | 43231509 |
Chemical Abstracts: | 2020:458362 |
OpenAlex: | W2996104687 |