Plasma-Chemical Deposition of Anti-Reflection and Protective Coating for Infrared Optics Научная публикация
| Журнал |
Russian Physics Journal
ISSN: 1064-8887 , E-ISSN: 1573-9228 |
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| Вых. Данные | Год: 2020, Том: 62, Номер: 11, Страницы: 2112-2120 Страниц : 9 DOI: 10.1007/s11182-020-01954-3 | ||||||
| Ключевые слова | anti-reflection coatings; protective coatings; infrared optics; plasma-chemical synthesis | ||||||
| Авторы |
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| Организации |
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Реферат:
The films of amorphous hydrogenated carbon doped with Si and O were deposited onto the sample of crystalline silicon by method of plasma-chemical deposition in the mix of polyphenyl methylsiloxane vapors and argon. Physico-mechanical and optical properties of films were examined for their use as anti-reflection and protective coatings in infrared optics devices. Film transparency in the wavelength range of 2.5–8 μm was measured by method of infrared spectroscopy with a Fourier transform. The structure and composition of films were studied by methods of Raman and X-ray photoelectron spectroscopy. Hardness and other mechanical properties of films were determined by nanoindentation. It was shown that the double-sided deposition of a-C:H:SiOx films onto Si plates allows increasing their integrated transmission in the wavelength region of 3– 5 μm from 50 to 87%. The films possess excellent mechanical characteristics, thermal stability in the temperature range from room temperature to 500°С, and resistance to aqueous solutions of salt.
Библиографическая ссылка:
Grenaderov A.S.
, Oskomov K.V.
, Solovyev A.A.
, Selivanova A.V.
, Konishchev M.E.
Plasma-Chemical Deposition of Anti-Reflection and Protective Coating for Infrared Optics
Russian Physics Journal. 2020. V.62. N11. P.2112-2120. DOI: 10.1007/s11182-020-01954-3 WOS Scopus РИНЦ CAPlus OpenAlex
Plasma-Chemical Deposition of Anti-Reflection and Protective Coating for Infrared Optics
Russian Physics Journal. 2020. V.62. N11. P.2112-2120. DOI: 10.1007/s11182-020-01954-3 WOS Scopus РИНЦ CAPlus OpenAlex
Оригинальная:
Гренадёров А.С.
, Оскомов К.В.
, Соловьёв А.А.
, Селиванова А.В.
, Конищев М.Е.
Плазмохимическое осаждение антиотражающего и защитного покрытия для ИК-оптики
Известия высших учебных заведений. Физика. 2019.
Т.62. №11. С.143-150. DOI: 10.17223/00213411/62/11/143RSCI
РИНЦ
OpenAlex
Плазмохимическое осаждение антиотражающего и защитного покрытия для ИК-оптики
Известия высших учебных заведений. Физика. 2019.
Т.62. №11. С.143-150. DOI: 10.17223/00213411/62/11/143RSCI
РИНЦ
OpenAlex
Даты:
| Поступила в редакцию: | 13 сент. 2019 г. |
| Опубликована в печати: | 1 мар. 2020 г. |
| Опубликована online: | 13 мар. 2020 г. |
Идентификаторы БД:
| Web of science: | WOS:000519832300015 |
| Scopus: | 2-s2.0-85082457122 |
| РИНЦ: | 43265352 |
| Chemical Abstracts: | 2020:499465 |
| OpenAlex: | W3011351981 |