Fabrication of High-Aspect-Ratio Microstructures on Tetraacrylate/Acrylamide Monomers Using Synchrotron Radiation | Sciact - CRIS-system of Boreskov Institute of Catalysis

Fabrication of High-Aspect-Ratio Microstructures on Tetraacrylate/Acrylamide Monomers Using Synchrotron Radiation Full article

Journal

High Energy Chemistry
ISSN: 0018-1439

Output data

Year: 2019, Volume: 53, Number: 2, Pages: 136-142 Pages count : 7 DOI: 10.1134/s0018143919020048

Tags

acrylamide monomers; acrylate monomers; polymerization; X-ray lithography; X-ray resist

Authors

Derevyanko D.I. ¹ , Orlova N.A. ¹ , Shelkovnikov V.V. ^1,2 , Shundrina I.K. ¹ , Goldenberg B.G. ³ , Korolkov V.P. ⁴

Affiliations

1	Novosibirsk Institute of Organic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia
2	Novosibirsk State Technical University, Novosibirsk, 630073 Russia
3	Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia
4	Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia

Photopolymer materials based on new polyacryl monomers of acrylate and mixed acrylate–acrylamide types have been obtained. Crosslinked films based on the synthesized monomers have been prepared by photopolymerization, and the thermomechanical properties of the crosslinked films have been studied. The storage modulus of the photopolymer films were determined at room temperature (1.3 and 1.5 GPa) and the glass transition temperature (82–93°С). High-aspect-ratio microstructures have been written using synchrotron radiation (SR) at the VEPP-3 storage ring (electron energy, 2 GeV) of a LIGA station at the Budker Institute of Nuclear Physics, SB RAS. It has been revealed that a synchrotron radiation dose of 1–15 J/cm3 results in polymerization of the monomers. The dependence of the thickness of a given microstructure on the absorbed SR dose has been found, and the corresponding characteristic curve has been constructed. Microstructures with an aspect ratio of 1 : 25 have been obtained.

Derevyanko D.I. , Orlova N.A. , Shelkovnikov V.V. , Shundrina I.K. , Goldenberg B.G. , Korolkov V.P.
Fabrication of High-Aspect-Ratio Microstructures on Tetraacrylate/Acrylamide Monomers Using Synchrotron Radiation
High Energy Chemistry. 2019. V.53. N2. P.136-142. DOI: 10.1134/s0018143919020048 WOS Scopus РИНЦ ANCAN OpenAlex

Деревянко Д.И. , Орлова Н.А. , Шелковников В.В. , Шундрина И.К. , Гольденберг Б.Г. , Корольков В.П.
Формирование высокоаспектных микроструктур на тетраакрилат/акриламидных мономерах под действием синхротронного излучения
Химия высоких энергий. 2019. Т.53. №2. С.127–134. DOI: 10.1134/S0023119319020049 РИНЦ OpenAlex

Submitted:	Apr 9, 2018
Accepted:	Nov 2, 2018
Published print:	Mar 1, 2019
Published online:	May 24, 2019

Web of science:	WOS:000469020800007
Scopus:	2-s2.0-85066323752
Elibrary:	41645139
Chemical Abstracts:	2019:1042188
Chemical Abstracts (print):	174:549673
OpenAlex:	W2946741416

DB	Citing
Web of science	1
Scopus	2
OpenAlex	2