Oxide-Free InAs(111)A Interface in Metal-Oxide-Semiconductor Structure with Very Low Density of States Pprepared by Anodic Oxidation | Sciact - CRIS-system of Boreskov Institute of Catalysis

Oxide-Free InAs(111)A Interface in Metal-Oxide-Semiconductor Structure with Very Low Density of States Pprepared by Anodic Oxidation Full article

Journal

Applied Physics Letters
ISSN: 0003-6951 , E-ISSN: 1077-3118

Output data

Year: 2014, Volume: 105, Pages: 161601-161605 Pages count : 5 DOI: 10.1063/1.4899137

Tags

Capacitance; Dielectric devices; Electrochemical oxidation; Electrolytes; III-V semiconductors; Indium arsenide; Interface states; Metals; MOS capacitors; Narrow band gap semiconductors; Oxide semiconductors; Passivation; Transistors; Wide band gap semiconductors

Authors

Valisheva N.A. ¹ , Aksenov M.S. ¹ , Golyashov V.A. ¹ , Levtsova T.A. ¹ , Kovchavtsev A.P. ¹ , Gutakovskii A.K. ^1,2 , Khandarkhaeva S.E. ² , Kalinkin A.V. ³ , Prosvirin I.P. ^2,3 , Bukhtiyarov V.I. ^2,3 , Tereshchenko O.E. ^1,2

Affiliations

1	Rzhanov Institute of Semiconductor Physics, SB RAS, 13, Lavrentiev Ave., Novosibirsk 630090, Russian Federation
2	Novosibirsk State University, 2 Pirogova Str., Novosibirsk 630090, Russian Federation
3	Boreskov Institute of Catalysis, SB RAS, 5, Lavrentiev Ave., Novosibirsk 630090, Russian Federation

Funding (2)

1	The Ministry of Education and Science of the Russian Federation	14.621.21.0004 (RFMEFI62114X0004)
2	Russian Science Foundation	14-22-00143

In this letter, we present structural, compositional, and electrical characteristics of anodic oxide layer-based metal-oxide-semiconductor (MOS) capacitors on n-type InAs(111)A, along with the effect of a thin fluorinated interfacial passivation layer. Electrochemical oxidation in acid electrolyte with addition of fluorine (NH4F) led to the formation of oxygen free well-ordered wide gap fluorinated interfacial layer at InAs(111)A with the fixed charge (Qfix) and density of interface states (Dit) in the range of (4–6)_1010cm_2 and (2–12)_1010eV_1cm_2, respectively. We found that MOS capacitors showed excellent capacitance-voltage characteristics with very small frequency dispersion (<1% and <15 mV). Fluorinated interfacial layer consists of crystalline isostructural compound with the InAs substrate, which remains intact with the atomic smoothness and sharpness that explain unpinned behavior of the Fermi level.

Valisheva N.A. , Aksenov M.S. , Golyashov V.A. , Levtsova T.A. , Kovchavtsev A.P. , Gutakovskii A.K. , Khandarkhaeva S.E. , Kalinkin A.V. , Prosvirin I.P. , Bukhtiyarov V.I. , Tereshchenko O.E.
Oxide-Free InAs(111)A Interface in Metal-Oxide-Semiconductor Structure with Very Low Density of States Pprepared by Anodic Oxidation
Applied Physics Letters. 2014. V.105. P.161601-161605. DOI: 10.1063/1.4899137 WOS Scopus РИНЦ ANCAN OpenAlex

Submitted:	Aug 24, 2014
Accepted:	Oct 11, 2014
Published print:	Oct 20, 2014
Published online:	Oct 21, 2014

Web of science:	WOS:000344363000014
Scopus:	2-s2.0-84908191309
Elibrary:	23995265
Chemical Abstracts:	2014:1779819
Chemical Abstracts (print):	161:675471
OpenAlex:	W1969022416

DB	Citing
Web of science	11
Scopus	10
Elibrary	14
OpenAlex	12