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PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography Тезисы доклада

Конференция International Conference "Synchrotron and Free electron laser Radiation: generation and application"
27-30 июн. 2022 , Novosibirsk
Сборник Book of abstracts of International Conference "Synchrotron and Free Electron Laser Radiation: Generation and Application"
Сборник, ИЯФ СО РАН. Новосибирск.2022. 132 c. ISBN 9785904968083. РИНЦ
Вых. Данные Год: 2022, Номер статьи : 60, Страниц : 1
Авторы Nazmov Vladimir 1,2 , Varand Alexander 1 , Mikhailenko Mikhail 2 , Goldenberg Boris 1,3 , Prosanov I.Yu. 2 , Gerasimov K.B. 2 , Lubas G.A. 2
Организации
1 Budker Institute of Nuclear Physics of SB RAS, prosp.Lavrentieva 11, 630090 Novosibirsk, Russia
2 Institute of Solid State Chemistry and Mechanochemistry of SB RAS, Kutateladze 18, 630128 Novosibirsk, Russia
3 SRF “SKIF”

Реферат: In the present work, we studied polymethyl methacrylate, with a molecular weight of ten million grams per mole achieved by ionic polymerization, which differs from its widely used analogue by an approximately tenfold increase in the length of the polymer chain. Based on the obtained absorption spectra in the IR range, data from differential thermal analysis and gel permeation chromatography, the changes caused by the ionizing radiation are studied. During thermal decomposition of the initial polymer, the mass loss dependence can be divided into different sections: low-temperature with a maximum decomposition rate at 260.5-261 °C and a process start point at 207-209 °C and a high-temperature one with a maximum decomposition rate at 379-379 °C with a process start point at 346-348 °C and the end of the process at 398-400 °C.
Библиографическая ссылка: Nazmov V. , Varand A. , Mikhailenko M. , Goldenberg B. , Prosanov I.Y. , Gerasimov K.B. , Lubas G.A.
PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography
В сборнике Book of abstracts of International Conference "Synchrotron and Free Electron Laser Radiation: Generation and Application". – ИЯФ СО РАН., 2022. – C.60-61. – ISBN 9785904968083.
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