PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography | Sciact - CRIS-system of Boreskov Institute of Catalysis

PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography Conference Abstracts

Conference

International Conference "Synchrotron and Free electron laser Radiation: generation and application"
27-30 Jun 2022 , Novosibirsk

Source

Book of abstracts of International Conference "Synchrotron and Free Electron Laser Radiation: Generation and Application"
Compilation, ИЯФ СО РАН. Новосибирск.2022. 132 c. ISBN 9785904968083. РИНЦ

Output data

Year: 2022, Article number : 60, Pages count : 1

Authors

Nazmov Vladimir ^1,2 , Varand Alexander ¹ , Mikhailenko Mikhail ² , Goldenberg Boris ^1,3 , Prosanov I.Yu. ² , Gerasimov K.B. ² , Lubas G.A. ²

Affiliations

1	Budker Institute of Nuclear Physics of SB RAS, prosp.Lavrentieva 11, 630090 Novosibirsk, Russia
2	Institute of Solid State Chemistry and Mechanochemistry of SB RAS, Kutateladze 18, 630128 Novosibirsk, Russia
3	SRF “SKIF”

In the present work, we studied polymethyl methacrylate, with a molecular weight of ten million grams per mole achieved by ionic polymerization, which differs from its widely used analogue by an approximately tenfold increase in the length of the polymer chain. Based on the obtained absorption spectra in the IR range, data from differential thermal analysis and gel permeation chromatography, the changes caused by the ionizing radiation are studied. During thermal decomposition of the initial polymer, the mass loss dependence can be divided into different sections: low-temperature with a maximum decomposition rate at 260.5-261 °C and a process start point at 207-209 °C and a high-temperature one with a maximum decomposition rate at 379-379 °C with a process start point at 346-348 °C and the end of the process at 398-400 °C.

Nazmov V. , Varand A. , Mikhailenko M. , Goldenberg B. , Prosanov I.Y. , Gerasimov K.B. , Lubas G.A.
PMMA with a Molecular Weight of Ten Million Grams Per Mole for X-ray Lithography
In compilation Book of abstracts of International Conference "Synchrotron and Free Electron Laser Radiation: Generation and Application". – ИЯФ СО РАН., 2022. – C.60-61. – ISBN 9785904968083.

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