Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography | Sciact - CRIS-система Института катализа

Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography Научная публикация

Журнал

Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques
ISSN: 1027-4510 , E-ISSN: 1819-7094

Вых. Данные

Год: 2023, Том: 17, Номер: 3, Страницы: 652-655 Страниц : 4 DOI: 10.1134/s102745102303028x

Ключевые слова

polymethyl methacrylate, IR spectroscopy, gel permeation chromatography, differential thermal analysis, contrast, X-rays, sensitivity, microstructures, X-ray lithography

Авторы

Nazmov V.P. ^1,2 , Varand A.V. ¹ , Mikhailenko M.A. ² , Goldenberg B.G. ^1,3 , Prosanov I.Yu. ² , Gerasimov K.B. ²

Организации

1	Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia
2	Institute of Solid State Chemistry and Mechanochemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia
3	Collective Centre SKIF, Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630559 Russia

The paper presents the results of a study of syndiotactic polymethyl methacrylate with a molecular weight of 107 g/mol, synthesized by the method of ionic polymerization with radiation initiation. Changes in the chemical structure of the polymer material were analyzed by means of IR spectroscopy, differential thermal analysis, and gel permeation chromatography. The process of weight loss during thermal decomposition of the initial polymer can be divided into three stages: low-temperature, medium-temperature, and high-temperature ones. After exposure of the polymer even to minimum doses of ionizing radiation, there is no pronounced thermal effect of polymer melting. A scatter in the molecular sizes was found, as well as a relatively rapid decrease in the molecular weight under the action of X-rays in the dose range of up to 100 J/cm3. Polydispersity at low doses is approximately 3.5 times higher than that at doses on the order of 10 kJ/cm3. The achieved rate of latent image development was approximately five times compared with the polymer with a molecular weight of 106 g/mol under standard conditions. The contrast was 3.4. Microstructuring was performed by the X-ray lithography method on the VEPP-3 source with the use of synchrotron X-rays. The resulting microstructures are up to 5 µm high and about 2 µm in diameter.

Nazmov V.P. , Varand A.V. , Mikhailenko M.A. , Goldenberg B.G. , Prosanov I.Y. , Gerasimov K.B.
Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. 2023. V.17. N3. P.652-655. DOI: 10.1134/s102745102303028x WOS Scopus РИНЦ CAPlusCA OpenAlex СКИФ ID

Назьмов В.П. , Варанд А.В. , Михайленко М.А. , Гольденберг Б.Г. , Просанов И.Ю. , Герасимов К.Б.
Полиметилметакрилат с молекулярной массой 107 г/моль для рентгеновской литографии
Поверхность. Рентгеновские, синхротронные и нейтронные исследования. 2023. №6. С.27-31. DOI: 10.31857/S1028096023060110 РИНЦ OpenAlex СКИФ ID

Поступила в редакцию:	16 окт. 2022 г.
Принята к публикации:	22 дек. 2022 г.
Опубликована в печати:	16 июн. 2023 г.
Опубликована online:	16 июн. 2023 г.

Web of science:	WOS:001009238900018
Scopus:	2-s2.0-85161987474
РИНЦ:	54261803
Chemical Abstracts:	2023:1257157
Chemical Abstracts (print):	183:188480
OpenAlex:	W4380881890
СКИФ ID:	2839

БД	Цитирований
OpenAlex	3
РИНЦ	3
Web of science	2
Scopus	3