Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography Научная публикация
Журнал |
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques
ISSN: 1027-4510 , E-ISSN: 1819-7094 |
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Вых. Данные | Год: 2023, Том: 17, Номер: 3, Страницы: 652-655 Страниц : 4 DOI: 10.1134/s102745102303028x | ||||||
Ключевые слова | polymethyl methacrylate, IR spectroscopy, gel permeation chromatography, differential thermal analysis, contrast, X-rays, sensitivity, microstructures, X-ray lithography | ||||||
Авторы |
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Организации |
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Реферат:
The paper presents the results of a study of syndiotactic polymethyl methacrylate with a molecular weight of 107 g/mol, synthesized by the method of ionic polymerization with radiation initiation. Changes in the chemical structure of the polymer material were analyzed by means of IR spectroscopy, differential thermal analysis, and gel permeation chromatography. The process of weight loss during thermal decomposition of the initial polymer can be divided into three stages: low-temperature, medium-temperature, and high-temperature ones. After exposure of the polymer even to minimum doses of ionizing radiation, there is no pronounced thermal effect of polymer melting. A scatter in the molecular sizes was found, as well as a relatively rapid decrease in the molecular weight under the action of X-rays in the dose range of up to 100 J/cm3. Polydispersity at low doses is approximately 3.5 times higher than that at doses on the order of 10 kJ/cm3. The achieved rate of latent image development was approximately five times compared with the polymer with a molecular weight of 106 g/mol under standard conditions. The contrast was 3.4. Microstructuring was performed by the X-ray lithography method on the VEPP-3 source with the use of synchrotron X-rays. The resulting microstructures are up to 5 µm high and about 2 µm in diameter.
Библиографическая ссылка:
Nazmov V.P.
, Varand A.V.
, Mikhailenko M.A.
, Goldenberg B.G.
, Prosanov I.Y.
, Gerasimov K.B.
Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. 2023. V.17. N3. P.652-655. DOI: 10.1134/s102745102303028x WOS Scopus РИНЦ CAPlusCA OpenAlex СКИФ ID
Polymethyl Metacrylate with a Molecular Weight of 107 g/mol for X-ray Lithography
Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. 2023. V.17. N3. P.652-655. DOI: 10.1134/s102745102303028x WOS Scopus РИНЦ CAPlusCA OpenAlex СКИФ ID
Оригинальная:
Назьмов В.П.
, Варанд А.В.
, Михайленко М.А.
, Гольденберг Б.Г.
, Просанов И.Ю.
, Герасимов К.Б.
Полиметилметакрилат с молекулярной массой 107 г/моль для рентгеновской литографии
Поверхность. Рентгеновские, синхротронные и нейтронные исследования. 2023. №6. С.27-31. DOI: 10.31857/S1028096023060110 РИНЦ OpenAlex СКИФ ID
Полиметилметакрилат с молекулярной массой 107 г/моль для рентгеновской литографии
Поверхность. Рентгеновские, синхротронные и нейтронные исследования. 2023. №6. С.27-31. DOI: 10.31857/S1028096023060110 РИНЦ OpenAlex СКИФ ID
Даты:
Поступила в редакцию: | 16 окт. 2022 г. |
Принята к публикации: | 22 дек. 2022 г. |
Опубликована в печати: | 16 июн. 2023 г. |
Опубликована online: | 16 июн. 2023 г. |
Идентификаторы БД:
Web of science: | WOS:001009238900018 |
Scopus: | 2-s2.0-85161987474 |
РИНЦ: | 54261803 |
Chemical Abstracts: | 2023:1257157 |
Chemical Abstracts (print): | 183:188480 |
OpenAlex: | W4380881890 |
СКИФ ID: | 2839 |