Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition | Sciact - CRIS-система Института катализа

Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition Научная публикация

Журнал

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Вых. Данные

Год: 2025, Том: 70, Номер: 9, Страницы: 1379-1390 Страниц : 12 DOI: 10.1134/S0036023625602752

Ключевые слова

atomic layer deposition, thin films, ellipsometry, X-ray diffraction, X-ray photoelectron spectroscopy

Авторы

Petukhova D.E. ¹ , Korolkov I.V. ¹ , Saraev A.A. ² , Lebedev M.S. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, 630090 Russia
2	Boreskov Institute of Catalysis, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, 630090 Russia

Информация о финансировании (3)

1	Министерство науки и высшего образования Российской Федерации (с 15 мая 2018)	FWUZ-2021-0005 (121031700313-8)
2	Министерство науки и высшего образования Российской Федерации (с 15 мая 2018)	FWUR-2024-0032
3	Министерство науки и высшего образования Российской Федерации (с 15 мая 2018)	FWUZ-2025-0004 (125021001790-0)(075-03-2025-190)

Ternary Ti–Sc–O thin films were prepared by atomic layer deposition (ALD) at 300°C via the alternation of reaction cycles with the TiCl4 or Sc(MeCp)3 precursor and H2O as the co-reactant. Materials with [Sc]/([Ti] + [Sc]) = 13, 25, 44, 64, or 82% were prepared at various ratios between the alternating cycles. The films were characterized by spectroscopic and single-wavelength null ellipsometry, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and X-ray diffraction. Film growth occurred within the temperature window of ALD and was substrate-inhibited. The dominant oxidation states of the metals were Ti4+ and Sc3+. Low scandium concentrations (up to [Sc]/([Ti] + [Sc]) = 25%) suppressed film crystallization into anatase as opposed to what was observed for TiO2 films. The materials formed in the range [Sc]/([Ti] + [Sc]) = 44–100% had cubic structures; as the scandium concentration increases, the structure changed from disordered fluorite Sc4Ti3O12 to Sc2O3-base cubic solid solution. The refractive indices n(E), absorption coefficients k(E), and optical bandgaps were well fitted to the Tauc–Lorentz model with a sharp absorption edge. They varied between the respective parameters of TiO2 and Sc2O3 depending on the composition, which is topical for applied problems in optics, photonics, solar energy, and photocatalysis.

Petukhova D.E. , Korolkov I.V. , Saraev A.A. , Lebedev M.S.
Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition
Russian Journal of Inorganic Chemistry. 2025. V.70. N9. P.1379-1390. DOI: 10.1134/S0036023625602752 WOS Scopus РИНЦ

Петухова Д.Е. , Корольков И.В. , Сараев А.А. , Лебедев М.С.
Характеристики роста, фазовый состав и оптические свойства тонких пленок Ti-Sc-O, синтезированных методом атомно-слоевого осаждения
Журнал неорганической химии. 2025. Т.70. №9. С.1188-1200. DOI: 10.7868/S3034560X25090115 РИНЦ

Поступила в редакцию:	28 мар. 2025 г.
Принята к публикации:	11 июн. 2025 г.
Опубликована в печати:	1 сент. 2025 г.
Опубликована online:	29 окт. 2025 г.

Web of science:	WOS:001605697900009
Scopus:	2-s2.0-105020376250
РИНЦ:	83114196

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