Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition Full article
| Journal |
Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613 |
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| Output data | Year: 2025, Volume: 70, Number: 9, Pages: 1379-1390 Pages count : 12 DOI: 10.1134/S0036023625602752 | ||||
| Tags | atomic layer deposition, thin films, ellipsometry, X-ray diffraction, X-ray photoelectron spectroscopy | ||||
| Authors |
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| Affiliations |
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Funding (3)
| 1 | Ministry of Science and Higher Education of the Russian Federation | FWUZ-2021-0005 (121031700313-8) |
| 2 | Ministry of Science and Higher Education of the Russian Federation | FWUR-2024-0032 |
| 3 | Ministry of Science and Higher Education of the Russian Federation | FWUZ-2025-0004 (125021001790-0)(075-03-2025-190) |
Abstract:
Ternary Ti–Sc–O thin films were prepared by atomic layer deposition (ALD) at 300°C via the alternation of reaction cycles with the TiCl4 or Sc(MeCp)3 precursor and H2O as the co-reactant. Materials with [Sc]/([Ti] + [Sc]) = 13, 25, 44, 64, or 82% were prepared at various ratios between the alternating cycles. The films were characterized by spectroscopic and single-wavelength null ellipsometry, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and X-ray diffraction. Film growth occurred within the temperature window of ALD and was substrate-inhibited. The dominant oxidation states of the metals were Ti4+ and Sc3+. Low scandium concentrations (up to [Sc]/([Ti] + [Sc]) = 25%) suppressed film crystallization into anatase as opposed to what was observed for TiO2 films. The materials formed in the range [Sc]/([Ti] + [Sc]) = 44–100% had cubic structures; as the scandium concentration increases, the structure changed from disordered fluorite Sc4Ti3O12 to Sc2O3-base cubic solid solution. The refractive indices n(E), absorption coefficients k(E), and optical bandgaps were well fitted to the Tauc–Lorentz model with a sharp absorption edge. They varied between the respective parameters of TiO2 and Sc2O3 depending on the composition, which is topical for applied problems in optics, photonics, solar energy, and photocatalysis.
Cite:
Petukhova D.E.
, Korolkov I.V.
, Saraev A.A.
, Lebedev M.S.
Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition
Russian Journal of Inorganic Chemistry. 2025. V.70. N9. P.1379-1390. DOI: 10.1134/S0036023625602752 WOS Scopus РИНЦ
Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition
Russian Journal of Inorganic Chemistry. 2025. V.70. N9. P.1379-1390. DOI: 10.1134/S0036023625602752 WOS Scopus РИНЦ
Original:
Петухова Д.Е.
, Корольков И.В.
, Сараев А.А.
, Лебедев М.С.
Характеристики роста, фазовый состав и оптические свойства тонких пленок Ti-Sc-O, синтезированных методом атомно-слоевого осаждения
Журнал неорганической химии. 2025. Т.70. №9. С.1188-1200. DOI: 10.7868/S3034560X25090115 РИНЦ
Характеристики роста, фазовый состав и оптические свойства тонких пленок Ti-Sc-O, синтезированных методом атомно-слоевого осаждения
Журнал неорганической химии. 2025. Т.70. №9. С.1188-1200. DOI: 10.7868/S3034560X25090115 РИНЦ
Dates:
| Submitted: | Mar 28, 2025 |
| Accepted: | Jun 11, 2025 |
| Published print: | Sep 1, 2025 |
| Published online: | Oct 29, 2025 |
Identifiers:
| Web of science: | WOS:001605697900009 |
| Scopus: | 2-s2.0-105020376250 |
| Elibrary: | 83114196 |
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