Multifunctional X-ray Lithography Station at VEPP-3 - Доклады на конференциях | Sciact - CRIS-система Института катализа

Multifunctional X-ray Lithography Station at VEPP-3 Доклады на конференциях

Язык

Английский

Тип доклада

Стендовый

Url доклада

https://indico.inp.nsk.su/event/3/contributions/1319/

Конференция

The International Conference "Synchrotron and Free electron laser Radiation: generation and application"
04-07 июл. 2016 , Novosibirsk

Авторы

Гольденберг Борис Григорьевич ¹ , Лемзяков Алексей Георгиевич ¹ , Пиндюрин Валерий Федорович ¹ , Назьмов Владимир Петрович ¹

Организации

1	Институт ядерной физики имени Г.И. Будкера СО РАН

The multifunctional station “LIGA” at synchrotron radiation source VEPP-3 is part of shared-usage "Siberian Center for Synchrotron and Terahertz Radiation" infrastructure. The apparatus used for X-ray lithography are usable for samples with size in range from 1 to 10 cm and resist layers thickness in range 1 μm to 7 mm. The development of processing methods and equipment of station is kept on. Present article deal with the capabilities of station “LIGA” and samples of produced microstructures.

Goldenberg B.G. , Lemzyakov A.A. , Pindyurin V.F. , Nazmov V.P.
Multifunctional X-ray Lithography Station at VEPP-3
The International Conference "Synchrotron and Free electron laser Radiation: generation and application" 04-07 Jul 2016