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Multifunctional X-ray Lithography Station at VEPP-3 Conference attendances

Language Английский
Participant type Стендовый
URL https://indico.inp.nsk.su/event/3/contributions/1319/
Conference The International Conference "Synchrotron and Free electron laser Radiation: generation and application"
04-07 Jul 2016 , Novosibirsk
Authors Goldenberg Boris Grigoryevich 1 , Lemzyakov A. A. 1 , Pindyurin V. F. 1 , Nazmov Vladimir P. 1
Affiliations
1 Budker Institute of Nuclear Physics SB RAS

Abstract: The multifunctional station “LIGA” at synchrotron radiation source VEPP-3 is part of shared-usage "Siberian Center for Synchrotron and Terahertz Radiation" infrastructure. The apparatus used for X-ray lithography are usable for samples with size in range from 1 to 10 cm and resist layers thickness in range 1 μm to 7 mm. The development of processing methods and equipment of station is kept on. Present article deal with the capabilities of station “LIGA” and samples of produced microstructures.
Cite: Goldenberg B.G. , Lemzyakov A.A. , Pindyurin V.F. , Nazmov V.P.
Multifunctional X-ray Lithography Station at VEPP-3
The International Conference "Synchrotron and Free electron laser Radiation: generation and application" 04-07 Jul 2016