Structure of HfO2 Films and Binary Oxides on Its Base Full article
Journal |
Journal of Structural Chemistry
ISSN: 0022-4766 , E-ISSN: 1573-8779 |
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Output data | Year: 2012, Volume: 53, Number: 4, Pages: 708-714 Pages count : 7 DOI: 10.1134/S0022476612040130 | ||||
Tags | Binary solutions, Hafnium dioxide, High-k dielectrics | ||||
Authors |
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Affiliations |
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Funding (9)
1 | Президиум РАН | 21 |
2 | The Ministry of Education and Science of the Russian Federation | 16.518.11.7019 |
3 | Russian Foundation for Basic Research | 12-03-01039 (01201258422) |
4 | Russian Foundation for Basic Research | 12-03-01154 |
5 | Russian Foundation for Basic Research | 10-03-01005 |
6 | Russian Foundation for Basic Research | 08-03-92502 |
7 | Russian Foundation for Basic Research | 09-03-01012 |
8 | Siberian Branch of the Russian Academy of Sciences | 98 |
9 | Президиум РАН | 20 |
Abstract:
The chemical composition and structure of HfO2 films and binary oxides formed by their doping with aluminum and scandium are analyzed. It is shown that aluminum doping of HfO2 causes film amorphization: at the Al concentration above 30 at.% the film becomes amorphous. Scandium doping of HfO2 modifies the monoclinic structure, and in the Sc concentration range from ∼9 at.% to ∼14 at.% Sc under non-equilibrium conditions of the CVD process at 600°C a solid solution film of the orthorhombic structure forms.
Cite:
Smirnova T.P.
, Yakovkina L.V.
, Borisov V.O.
, Kichai V.N.
, Kaichev V.V.
, Kriventsov V.V.
Structure of HfO2 Films and Binary Oxides on Its Base
Journal of Structural Chemistry. 2012. V.53. N4. P.708-714. DOI: 10.1134/S0022476612040130 WOS Scopus РИНЦ
Structure of HfO2 Films and Binary Oxides on Its Base
Journal of Structural Chemistry. 2012. V.53. N4. P.708-714. DOI: 10.1134/S0022476612040130 WOS Scopus РИНЦ
Original:
Смирнова Т.П.
, Яковкина Л.В.
, Борисов В.О.
, Кичай В.Н.
, Каичев В.В.
, Кривенцов В.В.
Структура пленок HfO2 и двойных оксидов на его основе
Журнал структурной химии. 2012. Т.53. №4. С.718-724. RSCI РИНЦ
Структура пленок HfO2 и двойных оксидов на его основе
Журнал структурной химии. 2012. Т.53. №4. С.718-724. RSCI РИНЦ
Dates:
Submitted: | Oct 25, 2011 |
Published print: | Jul 1, 2012 |
Published online: | Sep 29, 2012 |
Identifiers:
Web of science | WOS:000309346900013 |
Scopus | 2-s2.0-84867092337 |
Elibrary | 20489958 |
Chemical Abstracts | 2012:1425851 |
Chemical Abstracts (print) | 158:432954 |
OpenAlex | W2463157262 |