Fabrication and Performance Characteristics of a Ni/C Multilayer Grating for Hard X-Rays
Научная публикация
| Общее |
Язык:
Английский,
Жанр:
Статья (Full article),
Статус опубликования:
Опубликована,
Оригинальность:
Оригинальная
|
| Конференция |
Конференция по использованию синхротронного излучения
11-15 июл. 1994
,
Новосибирск
|
| Журнал |
Nuclear Instruments and Methods in Physics Research Section A
ISSN: 0168-9002
|
| Вых. Данные |
Год: 1995,
Том: 359,
Номер: 1-2,
Страницы: 138-140
Страниц
: 3
DOI:
10.1016/0168-9002(94)01679-8
|
| Авторы |
Chernov V.A.
1
,
Chkhalo N.I.
2
,
Kovalenko N.V.
3
,
Mytnichenko S.V.
3
|
| Организации |
| 1 |
Siberian SR Center at Budker Institute of Nuclear Physics
|
| 2 |
Budker Institute of Nuclear Physics, 630090 Novosibirsk, Russian Federation
|
| 3 |
Institute of Catalysis, 630090 Novosibirsk, Russian Federation
|
|
Информация о финансировании (2)
|
1
|
Российский фонд фундаментальных исследований
|
93-02-3944
|
|
2
|
Российский фонд фундаментальных исследований
|
93-02-3942
|
We have fabricated and tested a lamella multilayer grating for the hard X-ray range with a grating period of 0.97 μm and a NiC multilayer period of 4.0 nm. To obtain large size gratings the fabrication process included holographic lithography and ion-beam etching. The reflectivity measurements obtained using a triple-axis diffractometer have shown that the diffraction efficiency and the relative intensities of the diffracted orders strongly depend on the incident angle. A very encouraging result is the possibility to direct practically all diffracted energy to any one first order with total suppression of the other orders.